Calibration Procedures

Calibrating the Dimension Icon SPM for optimal performance requires one or more of the following procedures:

• Center XYZ
• Calibration Setup—This procedure is a necessary first step to all other calibration procedures
• Adjust Sample Orthogonality
• Linearity Correction—Linearity adjustments (if necessary) must be performed prior to X, Y, and Z calibrations.
• Capture Calibration and Auto Calibration—Used for general XY calibration in open loop.
• Fine-tuning for XY Calibration
• Open Loop Z Calibration
• Closed Loop XY Calibration
• Closed Loop Z Calibration
• Colinearity Calibration

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